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Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation

โœ Scribed by Gretillat, F.; Gretillat, M.-A.; de Rooij, N.F.


Book ID
118138995
Publisher
IEEE
Year
1999
Tongue
English
Weight
648 KB
Volume
8
Category
Article
ISSN
1057-7157

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