✦ LIBER ✦
Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures
✍ Scribed by A. Ravi Sankar; J. Grace Jency; S. Das
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 976 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0946-7076
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