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Derivation of tensile flow properties of thin films using nanoindentation technique

✍ Scribed by Jeong-Hoon Ahn; Eun-chae Jeon; Yeol Choi; Yun-Hee Lee; Dongil Kwon

Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
335 KB
Volume
2
Category
Article
ISSN
1567-1739

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In recent years, the extraction of mechanical behaviour of thin films by nanoindentation using sharp indenter geometry has been extensively studied. This work investigates the mechanical properties of TiO 2 thin film (1 ΞΌm thickness) deposited by spin coating on dual phase Duplex stainless steel and