✦ LIBER ✦
Nanomechanical properties of TiC, TiN and TiCN thin films using scanning probe microscopy and nanoindentation
✍ Scribed by Te-Hua Fang; Sheng-Rui Jian; Der-San Chuu
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 272 KB
- Volume
- 228
- Category
- Article
- ISSN
- 0169-4332
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