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Depth resolution in SIMS study of boron δ-doping in epitaxial silicon

✍ Scribed by J.C. Dupuy; G. Prudon; C. Dubois; P. Warren; D. Dutartre

Book ID
113285849
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
427 KB
Volume
85
Category
Article
ISSN
0168-583X

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