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Depth Profiled XPS Analysis of a Polymerized Silicon-Carbon Thin Film

✍ Scribed by Paul R. Scott; David M. Wieliczka; Michael B. Kruger

Publisher: Springer
Year: 2009
Tongue: English
Weight: 235 KB
Volume: 29
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-009-9197-8

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