Depth profile of C 60 ion-used X-ray photoelectron spectroscopy (XPS) was studied on fluorinated organic layers with different thicknesses. We found that the depth resolution decreased, the sputtering rate went down and the surface turned rough as the layer thickness increased. This is because carbo
Depth profile XPS analysis of polymeric materials by C60+ion sputtering
β Scribed by Takuya Nobuta; Toshio Ogawa
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 954 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0022-2461
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