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Depth Profile Analysis on the Nanometer Scale by a Combination of Electron Probe Microanalysis (EPMA) and Focused Ion Beam Specimen Preparation (FIB)

✍ Scribed by B�ckins, Matthias ;Aretz, Anke ;Richter, Silvia ;Kyrsta, Stepan ;Sp�hn, Michael ;Mayer, Joachim


Publisher
Springer-Verlag
Year
2004
Weight
194 KB
Volume
145
Category
Article
ISSN
0344-838X

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