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XPS investigations of thin tantalum films on a silicon surface

✍ Scribed by M. Zier; S. Oswald; R. Reiche; K. Wetzig

Publisher: Springer
Year: 2003
Tongue: English
Weight: 228 KB
Volume: 375
Category: Article
ISSN: 1618-2650
DOI: 10.1007/s00216-003-1788-2

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