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Deposition of ZnO films by rf sputtering

✍ Scribed by M.Di Giulio; A. Valentini; L. Vasanelli

Book ID: 113299090
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 427 KB
Volume: 9
Category: Article
ISSN: 0254-0584
DOI: 10.1016/0254-0584(82)90019-0

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