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Growth evolution of ZnO thin films deposited by RF magnetron sputtering

✍ Scribed by Rosa, A M; da Silva, E P; Amorim, E; Chaves, M; Catto, A C; Lisboa-Filho, P N; Bortoleto, J R R

Book ID
121434532
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
979 KB
Volume
370
Category
Article
ISSN
1742-6588

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec