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Deposition of vanadium oxide films by direct-current magnetron reactive sputtering: E Kusano et al,J Vac Sci Technol,A6, 1988, 1663–1667

Book ID: 103470969
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 155 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90783-5

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