✦ LIBER ✦
7183. Low resistivity indium-tin oxide transparent conductive films. I. Effect of introducing H2O gas or H2 gas during direct current magnetron sputtering: S Ishibashi et al, J Vac Sci Technol, A8, 1990, 1399–1402
- Book ID
- 103468655
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 144 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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