Effect of resputtering on composition of WSix films deposited by multilayer sputtering: R Bruce et al,J Vac Sci Technol,A6, 1988, 1642–1645

• Book ID: 103470957
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 150 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90771-9