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Effect of resputtering on composition of WSix films deposited by multilayer sputtering

✍ Scribed by Bruce, R.

Book ID: 126773767
Publisher: AVS (American Vacuum Society)
Year: 1988
Tongue: English
Weight: 597 KB
Volume: 6
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.575300

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