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Effect of grain size on the oxidation kinetics of sputtered titanium nitride films: T P Thorpe et al,J Vac Sci Technol,A6, 1988, 1727–1729

Book ID: 103470967
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 155 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90781-1

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