7179. A comparison of SiO2 planarization
✦ LIBER ✦
7476. Stress state of chromium nitride films deposited by reactive direct current planar magnetron sputtering: P M Fabis et al,J Vac Sci Technol,A8, 1990, 3809–3818
- Book ID
- 103474700
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 176 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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