✦ LIBER ✦

Deposition of silicon carbide thin films from dodecamethylcyclohexasilane

✍ Scribed by Hisn-Tien Chiu; Shu-Fen Lee

Book ID: 104908754
Publisher: Springer
Year: 1991
Tongue: English
Weight: 454 KB
Volume: 10
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf00722649

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