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Deposition of osmium and ruthenium thin films from organometallic cluster precursors

✍ Scribed by Chunxiang Li; Weng Kee Leong; Kian Ping Loh

Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
214 KB
Volume
23
Category
Article
ISSN
0268-2605

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