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Thin film deposition from beams of ionized atoms and clusters

✍ Scribed by A.E.T. Kuiper; G.E. Thomas; W.J. Schouten

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 121 KB
Volume: 45
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(78)90458-x

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