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Fabrication of AIN thin films by reactive ionized cluster beam deposition technique

✍ Scribed by M. Koshinaka; H. Fujii; K. Nakanishi; Y. Shibuya

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 227 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)94148-j

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