ChemInform Abstract: Chemical Vapor Depo
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J. CHEON; J. E. GOZUM; G. S. GIROLAMI
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Article
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2010
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John Wiley and Sons
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Chemical Vapor Deposition of MoS2 and TiS2 Films from the Metal-Organic Precursors Mo(S-tBu)4 and Ti(S-tBu)4. -The formation of thin MoS2 and TiS2 films by MOCVD from the title precursors is studied and the decomposition mechanism is described. Amorphous films with low levels of oxygen and carbon co