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Deposition of Mo Oxide and Metallic Mo Films by Chemical Vapor Transport of MoO3(OH)2

✍ Scribed by Young Jung Lee; Young Ik Seo; Se Hoon Kim; Dae-Gun Kim; Young Do Kim


Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
728 KB
Volume
15
Category
Article
ISSN
0948-1907

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ChemInform Abstract: Chemical Vapor Depo
✍ J. CHEON; J. E. GOZUM; G. S. GIROLAMI πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons βš– 29 KB πŸ‘ 2 views

Chemical Vapor Deposition of MoS2 and TiS2 Films from the Metal-Organic Precursors Mo(S-tBu)4 and Ti(S-tBu)4. -The formation of thin MoS2 and TiS2 films by MOCVD from the title precursors is studied and the decomposition mechanism is described. Amorphous films with low levels of oxygen and carbon co