✦ LIBER ✦
Low pressure chemical vapor deposition of metallic films of iron, manganese, cobalt, copper, germanium and tin employing bis(trimethyl)silylamido complexes, M(N(SiMe3)2)n
✍ Scribed by Prof. David V. Baxter; Prof. Malcolm H. Chisholm; Dr. Gennaro J. Gama; Andrew L. Hector; Dr. Ivan P. Parkin
- Publisher
- John Wiley and Sons
- Year
- 1995
- Tongue
- English
- Weight
- 461 KB
- Volume
- 1
- Category
- Article
- ISSN
- 0948-1907
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