Deposition of GaSb Films from the Single-Source Precursor [t-Bu2GaSbEt2]2.
โ Scribed by Stephan Schulz; Sonja Fahrenholz; Andreas Kuczkowski; Wilfried Assenmacher; Andreas Seemayer; Alexander Hommes; Klaus Wandelt
- Publisher
- John Wiley and Sons
- Year
- 2005
- Weight
- 10 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0931-7597
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