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Deposition of Fluoropolymer Films on Si(100) Surfaces by Rf Magnetron Sputtering of Poly(tetrafluoroethylene)

✍ Scribed by Zhang, Yan; Yang, G. H.; Kang, E. T.; Neoh, K. G.; Huang, Wei; Huan, A. C. H.; Wu, S. Y.

Book ID: 125519723
Publisher: American Chemical Society
Year: 2002
Tongue: English
Weight: 156 KB
Volume: 18
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la011606j

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