Deposition of Ultrathin Fluoropolymer Films on Si(100) and GaAs(100) Surfaces by RF Magnetron Sputtering of Poly(tetrafluoroethylene- c o -hexafluoropropylene)

✍ Scribed by Yang, G. H.; Zhang, Yan; Kang, E. T.; Neoh, K. G.

• Book ID: 125519715
• Publisher: American Chemical Society
• Year: 2003
• Tongue: English
• Weight: 200 KB
• Volume: 107
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp0274031