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Deposition of aluminum nitride thin film on Si(1 1 1) by KrF excimer laser and its characterizations

✍ Scribed by Ming Chang Shih; Chi Wei Liang; Ping Ju Chaing

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
545 KB
Volume
254
Category
Article
ISSN
0169-4332

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