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Deposition and characterization of CVD-tungsten and tungsten carbonitrides on (100) Si

✍ Scribed by K.A. Gesheva; E.S. Vlakhov; G.I. Stoyanov; G.D. Beshkov; M. Marinov

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 313 KB
Volume: 22
Category: Article
ISSN: 0272-8842
DOI: 10.1016/0272-8842(95)00060-7

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