✦ LIBER ✦

Investigation of tungsten CVD on Mo and TiN

✍ Scribed by T. Gessner; B. Hintze; T. Raschke; S.E. Schulz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Investigations of the growth of tungsten

✍ Jiann-Ruey Chen; Yean-Kuen Fang; Shun-Liang Hsu 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 417 KB

Deposition and characterization of CVD-t

✍ K.A. Gesheva; E.S. Vlakhov; G.I. Stoyanov; G.D. Beshkov; M. Marinov 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 313 KB

Nucleation of TiN on tungsten needles

✍ N.N. Hamawi; K. Glejbøl 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 171 KB

Recollections and reflections of MO-CVD

✍ H.M. Manasevit 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 866 KB

A mathematical model of CVD of tungsten

✍ J. Wood; R. Collins 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 537 KB

Investigation of PA-CVD of TiN: Relation

✍ K.-T. Rie; A. Gebauer; J. Woehle 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 324 KB