✦ LIBER ✦
Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties
✍ Scribed by K.-T. Rie; A. Gebauer; J. Woehle
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 324 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0257-8972
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