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Deposition and characterization of BN/Si(0 0 1) using tris(dimethylamino)borane

✍ Scribed by Hervé Dumont; Béatrice Bayle; Bernard Bonnetot; Jean Bouix

Book ID: 114066142
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 188 KB
Volume: 37
Category: Article
ISSN: 0025-5408
DOI: 10.1016/s0025-5408(02)00844-9

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