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Deposition of titanium nitride on Si(1 0 0) wafers using plasma focus

✍ Scribed by Tousif Hussain; R. Ahmad; I.A. Khan; Jamil Siddiqui; Nida Khalid; Arshad Saleem Bhatti; Shahzad Naseem

Book ID: 108224444
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 638 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.008

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Deposition of titanium nitride on Si(1&#xa0;0&#xa0;0) wafers using plasma focus

Deposition of titanium nitride on Si(1 0 0) wafers using plasma focus