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DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation

✍ Scribed by V. P. Popov; I. V. Antonova; A. A. Frantsuzov; L. N. Safronov; A. I. Popov; O. V. Naumova; A. Kh. Antonenko; D. V. Kilanov; I. V. Mironova

Book ID: 110347425
Publisher: Springer
Year: 2002
Tongue: English
Weight: 369 KB
Volume: 31
Category: Article
ISSN: 1063-7397
DOI: 10.1023/a:1016335113235

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