Si3N4 SOI Structures Produced by Nitrogen Ion Implantation at High Energies and Beam Current Densities

✍ Scribed by F. F. Komarov; A. F. Komarov; S. A. Petrov

• Book ID: 110393761
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 39 KB
• Volume: 31
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1023/a:1020239025451