✦ LIBER ✦
Future Trends in Microelectronics (From Nanophotonics to Sensors and Energy) || Si 3 N 4 /SiO 2 Planar Photonic Structures Fabricated by Focused Ion Beam
✍ Scribed by Luryi, Serge; Xu, Jimmy; Zaslavsky, Alex
- Publisher
- John Wiley & Sons, Inc.
- Year
- 2010
- Weight
- 1016 KB
- Category
- Article
- ISBN
- 0470551372
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