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SOI structures produced by oxygen ion implantation and their annealing behaviour

โœ Scribed by Zheng Lirong; Lu Diantong; Wang Zhonglie; Zhang Bei; P.L.F. Hemment


Book ID
113282480
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
670 KB
Volume
55
Category
Article
ISSN
0168-583X

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