Deformation of nanostructures on polymer molds during soft UV nanoimprint lithography

✍ Scribed by Gilles, Sandra; Diez, Mar; Offenhäusser, Andreas; Lensen, Marga C; Mayer, Dirk

• Book ID: 120470530
• Publisher: Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 996 KB
• Volume: 21
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/21/24/245307