✦ LIBER ✦
Anisotropic remastering for reducing feature sizes on UV nanoimprint lithography replica molds
✍ Scribed by Lausecker, E; Grydlik, M; Brehm, M; Bergmair, I; Mühlberger, M; Fromherz, T; Bauer, G
- Book ID
- 120470533
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 648 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0957-4484
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