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Simulation of the Flow Behavior of Thin Polymer Film during Nanoimprint Lithography Based on a Viscoelastic Model

✍ Scribed by Fan, Xi Qiu


Book ID
120414531
Publisher
Trans Tech Publications, Ltd.
Year
2009
Tongue
English
Weight
361 KB
Volume
419-420
Category
Article
ISSN
1662-9795

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