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Deformation of and Stress in Epitaxial Silicon Films on Single-Crystal Sapphire

✍ Scribed by Dumin, D. J.

Book ID: 121820228
Publisher: American Institute of Physics
Year: 1965
Tongue: English
Weight: 494 KB
Volume: 36
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1714564

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