Thermal Stress Induced Thin Film Transfer from Single-crystal Silicon Layer on Sapphire Substrate

✍ Scribed by Lo, F. S.; Hsu, R. Y.; Ho, C. -C.; Li, C.; Lee, T. -H.

• Book ID: 121201960
• Publisher: Taylor and Francis Group
• Year: 2013
• Tongue: English
• Weight: 505 KB
• Volume: 144
• Category: Article
• ISSN: 1058-4587
• DOI: 10.1080/10584587.2013.787273