Residual stress measurement in filament-evaporated aluminium films on single crystal silicon wafers

✍ Scribed by Hai -Woong Park; S. Danyluk

• Publisher: Springer
• Year: 1991
• Tongue: English
• Weight: 699 KB
• Volume: 26
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf00576027