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Residual stress in epitaxial silicon film on sapphire

✍ Scribed by C.Y. Ang; H.M. Manasevit

Publisher: Elsevier Science
Year: 1965
Tongue: English
Weight: 539 KB
Volume: 8
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(65)90167-x

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