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R.F. sputtered silicon films on sapphire

✍ Scribed by R. Harman; V. Tvarožek; O. Vaněk; M. Kempný; J. Liday


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
225 KB
Volume
32
Category
Article
ISSN
0040-6090

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