Micropatterning of epitaxially grown YBCO thin films on ZrO2-buffered silicon single crystals

✍ Scribed by Gunter Beddies; Bernd Leibold; Hanns-Ulrich Habermeier; Ganghua Lu

• Book ID: 103944439
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 236 KB
• Volume: 185-189
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(91)91175-4

✦ Synopsis

Superconducting Y-Ba-Cu-O thin films are deposited on silicon (100) substrates where an intermediate buffer layer of yttria stablized zirconia [YSZ] i~ used to prevent mterdiffusion and interfacial reactions. Both layers are grown epitaxially by the pulsed laser deposition technique. The. films are patternea t)y two different schemes with different capabilities for ultrafine line definition. One is the conventional photoresist technique combined with ion milling, the other is a new type of selective epitaxy of the YBCO thin films on prepatterned YSZ thin films. In both cases critical temperatures around 90 K and critical currents exceeding 106 A/cm 2 at 77K are achieved.