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Defects and structure of hydrogenated microcrystalline silicon films deposited by different techniques

✍ Scribed by A.L.B. Neto; T. Dylla; S. Klein; T. Repmann; A. Lambertz; R. Carius; F. Finger


Book ID
116667691
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
296 KB
Volume
338-340
Category
Article
ISSN
0022-3093

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