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Defect imaging of SiGe strain relaxed buffers grown by LEPECVD

✍ Scribed by S. Marchionna; A. Virtuani; M. Acciarri; G. Isella; H. von Kaenel


Book ID
103846546
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
452 KB
Volume
9
Category
Article
ISSN
1369-8001

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