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Defect formation and annealing behavior of Si implanted by high-energy 166Er ions

✍ Scribed by Yuguo Li; Chunyu Tan; Chengshan Xue; Jingping Zhang; Honglei Xu; Pijun Liu; Lei Wang


Book ID
114164441
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
250 KB
Volume
174
Category
Article
ISSN
0168-583X

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