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Annealing Behavior of Crystalline Si Implanted with High Dose of Protons

✍ Scribed by Zhang, Miao ;Wang, Lianwei ;Zhou, Zuyao ;Lin, Zixin ;Lin, Chenglu


Book ID
101308708
Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
196 KB
Volume
165
Category
Article
ISSN
0031-8965

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