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High-dose implantation of Si in SiO2: formation of Si crystallites after annealing

✍ Scribed by Uma B. Ramabadran; Howard E. Jackson; G.C. Farlow


Book ID
113281613
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
482 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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